AODD Pumps for the Semiconductor Industry
Since 1984, Almatec® has been manufacturing a variety of specialty pumps for supplying and circulating chemicals in the semiconductor industry. With its straight-through flow pattern technology, the Almatec FUTUR Series Air-Operated Double-Diaphragm (AODD) Pump is ideally suited for the special requirements of these applications.
FUTUR Series pumps are self-priming and dry run capable, and feature a compact, simple design with few parts. FUTUR Series pumps have housing parts machined from solid blocks for long-life performance, and are cleaned, assembled and tested in a cleanroom line. For every pump size and material option, the appropriate pulsation damper is available.
The FUTUR is currently available in four materials:
- Four sizes made of PTFE/PE for acids and caustics up to 130°C (266°F) (FUTUR T model)
- Two sizes made of PTFE for hot applications with acids and caustics up to 200°C (392°F) (FUTUR H model)
- Two sizes made of PE for slurries (FUTUR E models)
- Two sizes made of SS316L for solvents (FUTUR S and SH models)
Features at a Glance:
- Four material versions (T/H/E/S) for different applications
- All plastic models contain no metal
- Temperature range up to 200ºC (392ºF)
- Patented, contactless cascade sealing between the product chambers
- No O-ring sealing in wetted areas
- Straight-through flow pattern, only one wetted housing part
- Maintenance-free PERSWING P® air control system
- Internal air flow
- Diaphragms without plates and gaskets, optimized diaphragm geometry
- Cylinder valves with surface sealing
- Easy to dismantle and assemble
- No elements to fix, including tie rods, nuts, or clamps
- Separate pulsation damper available for all materials and sizes
- Diaphragm and/or stroke sensors can be retrofitted easily
- Low noise level
Materials:
| PART | MATERIALS |
|---|---|
| Wetted Center Housing | PTFE, PE, SS316L (depends on the model) |
| Non-Wetted Side Housings | PTFE, PE, PE Conductive, SS316 (depends on the model) |
| Diaphragms | PTFE |
| Cylinder Valves | PTFE, PE (depends on the model) |
Technical Data:
| PUMP SIZE | 10 | 20 | 50 | 100 | |
|---|---|---|---|---|---|
| Dimensions for pump in mm (inch) | |||||
| Length | 185 (7.3) | 201 (7.9) | 246 (9.7) | 303 (11.9) | |
| Width | 114 (4.5) | 150 (5.9) | 200 (7.9) | 260 (10.2) | |
| Height | 131 (5.2) | 168 (6.6) | 216 (8.5) | 266 (10.5) | |
| Dimensions for pump with damper in mm (inch) | |||||
| Length | 185 (7.3) | 201 (7.9) | 246 (9.7) | 303 (11.9) | |
| Width | 136 (5.4) | 161 (6.4) | 215 (8.5) | 286 (11.3) | |
| Height | 246 (9.7) | 283 (11.1) | 348 (13.7) | 429 (16.9) | |
| Nominal port size (NPT) | 3/8" | 1/2" | 1" | 1 1/4" | |
| Air connection (NPT) | 1/4" | 1/4" | 1/4" | 1/4" | |
| Suction head, dry in mWC (ft.) | 1 (3.3) | 2.5 (8.2) | 3.5 (11.5) | 4 (13.1) | |
| Suction head, wet in mWC (ft.) | 8 (26.2) | 9 (29.5) | 9 (29.5) | 9 (29.5) | |
| Max. permissible driving pressure bar (psig) | 6 (87) | 6 (87) | 6 (87) | 6 (87) | |
| Max Capacities | l/min (gpm) | 10 (2.6) | 20 (5.3) | 50 (13) | 100 (26) |
Technical data of the FUTUR stainless steel models on request.
Max. Permitted Operating Temperature:
| PUMP MODEL | FUTUR H | FUTUR T | FUTUR E |
|---|---|---|---|
| at max. 6 bar (87 psig) |
100°C 212°F |
100°C 212°F |
70°C 158°F |
| at max. 5 bar (73 psig) |
130°C 266°F |
110°C 230°F |
70°C 158°F |
| at max. 4 bar (58 psig) |
150°C 302°F |
120°C 248°F |
70°C 158°F |
| at max. 3 bar (44 psig) |
180°C 356°F |
130°C 266°F |
70°C 158°F |
| at max. 2 bar (29 psig) |
200°C 392°F |
130°C 266°F |
70°C 158°F |
Performance:
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